JPS6437689U - - Google Patents
Info
- Publication number
- JPS6437689U JPS6437689U JP13248087U JP13248087U JPS6437689U JP S6437689 U JPS6437689 U JP S6437689U JP 13248087 U JP13248087 U JP 13248087U JP 13248087 U JP13248087 U JP 13248087U JP S6437689 U JPS6437689 U JP S6437689U
- Authority
- JP
- Japan
- Prior art keywords
- measurement
- sample
- measurement position
- moving
- measurement sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13248087U JPS6437689U (en]) | 1987-08-31 | 1987-08-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13248087U JPS6437689U (en]) | 1987-08-31 | 1987-08-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6437689U true JPS6437689U (en]) | 1989-03-07 |
Family
ID=31389479
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13248087U Pending JPS6437689U (en]) | 1987-08-31 | 1987-08-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6437689U (en]) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5919804A (ja) * | 1982-07-26 | 1984-02-01 | Hitachi Ltd | 放射線厚さ計のオンライン自動校正装置 |
JPS5954913A (ja) * | 1982-09-22 | 1984-03-29 | Sumitomo Metal Ind Ltd | 放射線厚み計の校正方法及びその治具 |
JPS60262005A (ja) * | 1984-06-09 | 1985-12-25 | Rikagaku Kenkyusho | 膜厚計測方法 |
JPS61223507A (ja) * | 1985-03-29 | 1986-10-04 | Fuji Electric Co Ltd | 圧延コントロール用放射線透過式厚さ計の校正方法 |
-
1987
- 1987-08-31 JP JP13248087U patent/JPS6437689U/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5919804A (ja) * | 1982-07-26 | 1984-02-01 | Hitachi Ltd | 放射線厚さ計のオンライン自動校正装置 |
JPS5954913A (ja) * | 1982-09-22 | 1984-03-29 | Sumitomo Metal Ind Ltd | 放射線厚み計の校正方法及びその治具 |
JPS60262005A (ja) * | 1984-06-09 | 1985-12-25 | Rikagaku Kenkyusho | 膜厚計測方法 |
JPS61223507A (ja) * | 1985-03-29 | 1986-10-04 | Fuji Electric Co Ltd | 圧延コントロール用放射線透過式厚さ計の校正方法 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6437689U (en]) | ||
EP0522962A1 (en) | Ion implanter with surface potential measuring system | |
JPH08327332A (ja) | クリームはんだ膜厚測定装置 | |
JPH11218503A (ja) | X線透過検査装置 | |
JPS60254615A (ja) | 電子ビーム露光における温度測定方法 | |
JPH0140064Y2 (en]) | ||
JP3570647B2 (ja) | X−y方式インサーキットテスタの非接触式足浮き検出装置並びに足浮き検出具 | |
KR900001985B1 (ko) | 반도체 디바이스 측정장치 | |
JPH0648737Y2 (ja) | イオン処理装置 | |
JP4514944B2 (ja) | 膜厚測定装置 | |
JP3758214B2 (ja) | 荷電粒子装置 | |
JP2961384B2 (ja) | 螢光x線による膜厚測定方法 | |
JPH0717023Y2 (ja) | フアンクシヨンテスタ | |
JPS6119774U (ja) | 走査電子顕微鏡を用いた電位測定装置 | |
JPS6116643Y2 (en]) | ||
JPH0321004Y2 (en]) | ||
JPH1194780A (ja) | 仕事関数測定方法、仕事関数測定装置、及び試料ホルダ | |
GB2131166A (en) | DNA analyser | |
JPH0526549Y2 (en]) | ||
JPS61149338U (en]) | ||
JPS59122922A (ja) | 半導体ウエハの吸着度測定装置 | |
JP2715507B2 (ja) | 電子ビームを用いた基板検査装置 | |
JPS59121946A (ja) | 電子ビ−ム装置 | |
JPS59149008U (ja) | 物体外周部欠落検知装置 | |
JPH0325238U (en]) |